2/11/2011	11:33:03 AM	Program started after a nonstandard shutdown
2/11/2011	11:33:04 AM	Helium valve closed
2/11/2011	11:33:04 AM	H2 valve closed
2/11/2011	11:33:04 AM	BCl3 valve closed
2/11/2011	11:33:04 AM	PH3 valve closed
2/11/2011	11:33:04 AM	SiCl4 pre valve closed
2/11/2011	11:33:04 AM	SiCl4 post valve closed
2/11/2011	11:33:04 AM	Main Vac valve closed
2/11/2011	11:33:04 AM	Bypass valve closed
2/11/2011	11:33:04 AM	Bubbler valve closed
2/11/2011	11:33:04 AM	Helium MFC set to  0.000000
2/11/2011	11:33:04 AM	H2 MFC set to  0.000000
2/11/2011	11:33:04 AM	BCl3 MFC set to  0.000000
2/11/2011	11:33:04 AM	PHl3 MFC set to  0.000000
2/11/2011	11:33:04 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:33:04 AM	Bypass solenoid MFC set to  760.000000
2/11/2011	11:33:05 AM	Tube furnace set to 0
2/11/2011	11:33:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	11:33:10 AM	Recipe started at 11:33 AM
2/11/2011	11:33:10 AM	Helium valve closed
2/11/2011	11:33:10 AM	H2 valve closed
2/11/2011	11:33:10 AM	BCl3 valve closed
2/11/2011	11:33:10 AM	PH3 valve closed
2/11/2011	11:33:10 AM	SiCl4 pre valve closed
2/11/2011	11:33:10 AM	SiCl4 post valve closed
2/11/2011	11:33:10 AM	Main Vac valve closed
2/11/2011	11:33:10 AM	Bubbler valve closed
2/11/2011	11:33:10 AM	Bypass valve opened
2/11/2011	11:33:10 AM	Helium MFC set to  0.000000
2/11/2011	11:33:10 AM	H2 MFC set to  0.000000
2/11/2011	11:33:10 AM	BCl3 MFC set to  0.000000
2/11/2011	11:33:10 AM	PHl3 MFC set to  0.000000
2/11/2011	11:33:10 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:33:10 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:33:10 AM	Tube furnace set to 0
2/11/2011	11:33:11 AM	Helium valve closed
2/11/2011	11:33:11 AM	H2 valve closed
2/11/2011	11:33:11 AM	BCl3 valve closed
2/11/2011	11:33:11 AM	PH3 valve closed
2/11/2011	11:33:11 AM	SiCl4 pre valve closed
2/11/2011	11:33:11 AM	SiCl4 post valve closed
2/11/2011	11:33:11 AM	Bubbler valve closed
2/11/2011	11:33:11 AM	Main Vac valve opened
2/11/2011	11:33:11 AM	Bypass valve opened
2/11/2011	11:33:11 AM	Helium MFC set to  0.000000
2/11/2011	11:33:11 AM	H2 MFC set to  0.000000
2/11/2011	11:33:11 AM	BCl3 MFC set to  0.000000
2/11/2011	11:33:11 AM	PHl3 MFC set to  0.000000
2/11/2011	11:33:11 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:33:11 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:33:11 AM	Tube furnace set to 0
2/11/2011	11:33:11 AM	Run finished at 11:33 AM
2/11/2011	11:33:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	11:41:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2011	11:41:32 AM	Recipe started at 11:41 AM
2/11/2011	11:41:32 AM	H2 valve closed
2/11/2011	11:41:32 AM	BCl3 valve closed
2/11/2011	11:41:32 AM	PH3 valve closed
2/11/2011	11:41:32 AM	SiCl4 pre valve closed
2/11/2011	11:41:32 AM	SiCl4 post valve closed
2/11/2011	11:41:32 AM	Main Vac valve closed
2/11/2011	11:41:32 AM	Bypass valve closed
2/11/2011	11:41:32 AM	Bubbler valve closed
2/11/2011	11:41:32 AM	Helium valve opened
2/11/2011	11:41:32 AM	Helium MFC set to  500.000000
2/11/2011	11:41:32 AM	H2 MFC set to  0.000000
2/11/2011	11:41:32 AM	BCl3 MFC set to  0.000000
2/11/2011	11:41:32 AM	PHl3 MFC set to  0.000000
2/11/2011	11:41:32 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:41:32 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:41:32 AM	Tube furnace set to 0
2/11/2011	11:42:52 AM	Helium valve closed
2/11/2011	11:42:52 AM	H2 valve closed
2/11/2011	11:42:52 AM	BCl3 valve closed
2/11/2011	11:42:52 AM	PH3 valve closed
2/11/2011	11:42:52 AM	SiCl4 pre valve closed
2/11/2011	11:42:52 AM	SiCl4 post valve closed
2/11/2011	11:42:52 AM	Main Vac valve closed
2/11/2011	11:42:52 AM	Bypass valve closed
2/11/2011	11:42:52 AM	Bubbler valve closed
2/11/2011	11:42:52 AM	Helium MFC set to  0.000000
2/11/2011	11:42:52 AM	H2 MFC set to  0.000000
2/11/2011	11:42:53 AM	BCl3 MFC set to  0.000000
2/11/2011	11:42:53 AM	PHl3 MFC set to  0.000000
2/11/2011	11:42:53 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:42:53 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:42:53 AM	Tube furnace set to 0
2/11/2011	11:42:53 AM	Run finished at 11:42 AM
2/11/2011	11:42:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2011	11:49:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	11:49:19 AM	Recipe started at 11:49 AM
2/11/2011	11:49:19 AM	Helium valve closed
2/11/2011	11:49:19 AM	H2 valve closed
2/11/2011	11:49:19 AM	BCl3 valve closed
2/11/2011	11:49:19 AM	PH3 valve closed
2/11/2011	11:49:19 AM	SiCl4 pre valve closed
2/11/2011	11:49:19 AM	SiCl4 post valve closed
2/11/2011	11:49:19 AM	Main Vac valve closed
2/11/2011	11:49:19 AM	Bubbler valve closed
2/11/2011	11:49:19 AM	Bypass valve opened
2/11/2011	11:49:19 AM	Helium MFC set to  0.000000
2/11/2011	11:49:19 AM	H2 MFC set to  0.000000
2/11/2011	11:49:19 AM	BCl3 MFC set to  0.000000
2/11/2011	11:49:19 AM	PHl3 MFC set to  0.000000
2/11/2011	11:49:19 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:49:19 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:49:20 AM	Tube furnace set to 0
2/11/2011	11:49:51 AM	Helium valve closed
2/11/2011	11:49:51 AM	H2 valve closed
2/11/2011	11:49:51 AM	BCl3 valve closed
2/11/2011	11:49:51 AM	PH3 valve closed
2/11/2011	11:49:51 AM	SiCl4 pre valve closed
2/11/2011	11:49:51 AM	SiCl4 post valve closed
2/11/2011	11:49:51 AM	Bubbler valve closed
2/11/2011	11:49:51 AM	Main Vac valve opened
2/11/2011	11:49:51 AM	Bypass valve opened
2/11/2011	11:49:51 AM	Helium MFC set to  0.000000
2/11/2011	11:49:51 AM	H2 MFC set to  0.000000
2/11/2011	11:49:51 AM	BCl3 MFC set to  0.000000
2/11/2011	11:49:51 AM	PHl3 MFC set to  0.000000
2/11/2011	11:49:51 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:49:51 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:49:52 AM	Tube furnace set to 0
2/11/2011	11:49:52 AM	Run finished at 11:49 AM
2/11/2011	11:49:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	11:50:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2011	11:50:20 AM	Recipe started at 11:50 AM
2/11/2011	11:50:20 AM	H2 valve closed
2/11/2011	11:50:20 AM	BCl3 valve closed
2/11/2011	11:50:20 AM	PH3 valve closed
2/11/2011	11:50:20 AM	SiCl4 pre valve closed
2/11/2011	11:50:20 AM	SiCl4 post valve closed
2/11/2011	11:50:20 AM	Main Vac valve closed
2/11/2011	11:50:20 AM	Bypass valve closed
2/11/2011	11:50:20 AM	Bubbler valve closed
2/11/2011	11:50:20 AM	Helium valve opened
2/11/2011	11:50:20 AM	Helium MFC set to  500.000000
2/11/2011	11:50:20 AM	H2 MFC set to  0.000000
2/11/2011	11:50:20 AM	BCl3 MFC set to  0.000000
2/11/2011	11:50:20 AM	PHl3 MFC set to  0.000000
2/11/2011	11:50:20 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:50:20 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:50:20 AM	Tube furnace set to 0
2/11/2011	11:51:42 AM	Helium valve closed
2/11/2011	11:51:42 AM	H2 valve closed
2/11/2011	11:51:42 AM	BCl3 valve closed
2/11/2011	11:51:42 AM	PH3 valve closed
2/11/2011	11:51:42 AM	SiCl4 pre valve closed
2/11/2011	11:51:42 AM	SiCl4 post valve closed
2/11/2011	11:51:42 AM	Main Vac valve closed
2/11/2011	11:51:42 AM	Bypass valve closed
2/11/2011	11:51:42 AM	Bubbler valve closed
2/11/2011	11:51:42 AM	Helium MFC set to  0.000000
2/11/2011	11:51:42 AM	H2 MFC set to  0.000000
2/11/2011	11:51:42 AM	BCl3 MFC set to  0.000000
2/11/2011	11:51:42 AM	PHl3 MFC set to  0.000000
2/11/2011	11:51:42 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:51:42 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:51:42 AM	Tube furnace set to 0
2/11/2011	11:51:42 AM	Run finished at 11:51 AM
2/11/2011	11:51:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2011	11:54:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	11:54:37 AM	Recipe started at 11:54 AM
2/11/2011	11:54:37 AM	Helium valve closed
2/11/2011	11:54:37 AM	H2 valve closed
2/11/2011	11:54:37 AM	BCl3 valve closed
2/11/2011	11:54:37 AM	PH3 valve closed
2/11/2011	11:54:37 AM	SiCl4 pre valve closed
2/11/2011	11:54:37 AM	SiCl4 post valve closed
2/11/2011	11:54:37 AM	Main Vac valve closed
2/11/2011	11:54:37 AM	Bubbler valve closed
2/11/2011	11:54:37 AM	Bypass valve opened
2/11/2011	11:54:37 AM	Helium MFC set to  0.000000
2/11/2011	11:54:37 AM	H2 MFC set to  0.000000
2/11/2011	11:54:37 AM	BCl3 MFC set to  0.000000
2/11/2011	11:54:37 AM	PHl3 MFC set to  0.000000
2/11/2011	11:54:37 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:54:37 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:54:37 AM	Tube furnace set to 0
2/11/2011	11:55:09 AM	Helium valve closed
2/11/2011	11:55:09 AM	H2 valve closed
2/11/2011	11:55:09 AM	BCl3 valve closed
2/11/2011	11:55:09 AM	PH3 valve closed
2/11/2011	11:55:09 AM	SiCl4 pre valve closed
2/11/2011	11:55:09 AM	SiCl4 post valve closed
2/11/2011	11:55:09 AM	Bubbler valve closed
2/11/2011	11:55:09 AM	Main Vac valve opened
2/11/2011	11:55:09 AM	Bypass valve opened
2/11/2011	11:55:09 AM	Helium MFC set to  0.000000
2/11/2011	11:55:09 AM	H2 MFC set to  0.000000
2/11/2011	11:55:09 AM	BCl3 MFC set to  0.000000
2/11/2011	11:55:09 AM	PHl3 MFC set to  0.000000
2/11/2011	11:55:09 AM	SiCl4 MFC set to  0.000000
2/11/2011	11:55:09 AM	Bypass solenoid MFC set to  0.000000
2/11/2011	11:55:09 AM	Tube furnace set to 0
2/11/2011	11:55:09 AM	Run finished at 11:55 AM
2/11/2011	11:55:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	11:56:02 AM	Helium MFC set to  20.000000
2/11/2011	11:56:02 AM	Helium valve opened
2/11/2011	12:02:02 PM	Helium valve closed
2/11/2011	12:02:45 PM	Helium valve opened
2/11/2011	12:21:09 PM	Helium valve closed
2/11/2011	12:25:48 PM	Helium valve opened
2/11/2011	12:28:34 PM	Helium valve closed
2/11/2011	12:29:32 PM	Recipe started at 12:29 PM
2/11/2011	12:29:32 PM	Helium valve closed
2/11/2011	12:29:32 PM	BCl3 valve closed
2/11/2011	12:29:32 PM	PH3 valve closed
2/11/2011	12:29:32 PM	SiCl4 pre valve closed
2/11/2011	12:29:32 PM	SiCl4 post valve closed
2/11/2011	12:29:32 PM	Main Vac valve closed
2/11/2011	12:29:32 PM	Bypass valve closed
2/11/2011	12:29:32 PM	Bubbler valve closed
2/11/2011	12:29:32 PM	H2 valve opened
2/11/2011	12:29:32 PM	Helium MFC set to  0.000000
2/11/2011	12:29:32 PM	H2 MFC set to  500.000000
2/11/2011	12:29:32 PM	BCl3 MFC set to  0.000000
2/11/2011	12:29:32 PM	PHl3 MFC set to  0.000000
2/11/2011	12:29:32 PM	SiCl4 MFC set to  0.000000
2/11/2011	12:29:32 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	12:29:33 PM	Tube furnace set to 0
2/11/2011	12:30:57 PM	Helium valve closed
2/11/2011	12:30:57 PM	BCl3 valve closed
2/11/2011	12:30:57 PM	PH3 valve closed
2/11/2011	12:30:57 PM	SiCl4 pre valve closed
2/11/2011	12:30:57 PM	SiCl4 post valve closed
2/11/2011	12:30:57 PM	Main Vac valve closed
2/11/2011	12:30:57 PM	Bypass valve closed
2/11/2011	12:30:57 PM	H2 valve opened
2/11/2011	12:30:57 PM	Bubbler valve opened
2/11/2011	12:30:57 PM	Helium MFC set to  0.000000
2/11/2011	12:30:57 PM	H2 MFC set to  500.000000
2/11/2011	12:30:57 PM	BCl3 MFC set to  0.000000
2/11/2011	12:30:57 PM	PHl3 MFC set to  0.000000
2/11/2011	12:30:57 PM	SiCl4 MFC set to  0.000000
2/11/2011	12:30:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	12:30:57 PM	Tube furnace set to 1000
2/11/2011	12:50:57 PM	Helium valve closed
2/11/2011	12:50:57 PM	BCl3 valve closed
2/11/2011	12:50:57 PM	PH3 valve closed
2/11/2011	12:50:57 PM	Main Vac valve closed
2/11/2011	12:50:57 PM	Bypass valve closed
2/11/2011	12:50:57 PM	H2 valve opened
2/11/2011	12:50:57 PM	SiCl4 pre valve opened
2/11/2011	12:50:57 PM	SiCl4 post valve opened
2/11/2011	12:50:57 PM	Bubbler valve opened
2/11/2011	12:50:57 PM	Helium MFC set to  0.000000
2/11/2011	12:50:57 PM	H2 MFC set to  500.000000
2/11/2011	12:50:57 PM	BCl3 MFC set to  0.000000
2/11/2011	12:50:57 PM	PHl3 MFC set to  0.000000
2/11/2011	12:50:57 PM	SiCl4 MFC set to  50.000000
2/11/2011	12:50:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	12:50:57 PM	Tube furnace set to 1000
2/11/2011	1:10:57 PM	Helium valve closed
2/11/2011	1:10:57 PM	BCl3 valve closed
2/11/2011	1:10:57 PM	PH3 valve closed
2/11/2011	1:10:57 PM	SiCl4 pre valve closed
2/11/2011	1:10:57 PM	SiCl4 post valve closed
2/11/2011	1:10:57 PM	Main Vac valve closed
2/11/2011	1:10:57 PM	Bypass valve closed
2/11/2011	1:10:57 PM	H2 valve opened
2/11/2011	1:10:57 PM	Bubbler valve opened
2/11/2011	1:10:57 PM	Helium MFC set to  0.000000
2/11/2011	1:10:57 PM	H2 MFC set to  500.000000
2/11/2011	1:10:57 PM	BCl3 MFC set to  0.000000
2/11/2011	1:10:57 PM	PHl3 MFC set to  0.000000
2/11/2011	1:10:57 PM	SiCl4 MFC set to  0.000000
2/11/2011	1:10:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	1:10:58 PM	Tube furnace set to 1000
2/11/2011	1:15:58 PM	H2 valve closed
2/11/2011	1:15:58 PM	BCl3 valve closed
2/11/2011	1:15:58 PM	PH3 valve closed
2/11/2011	1:15:58 PM	SiCl4 pre valve closed
2/11/2011	1:15:58 PM	SiCl4 post valve closed
2/11/2011	1:15:58 PM	Main Vac valve closed
2/11/2011	1:15:58 PM	Bypass valve closed
2/11/2011	1:15:58 PM	Helium valve opened
2/11/2011	1:15:58 PM	Bubbler valve opened
2/11/2011	1:15:58 PM	Helium MFC set to  500.000000
2/11/2011	1:15:58 PM	H2 MFC set to  0.000000
2/11/2011	1:15:58 PM	BCl3 MFC set to  0.000000
2/11/2011	1:15:58 PM	PHl3 MFC set to  0.000000
2/11/2011	1:15:58 PM	SiCl4 MFC set to  0.000000
2/11/2011	1:15:58 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	1:15:58 PM	Tube furnace set to 0
2/11/2011	1:38:57 PM	Helium valve closed
2/11/2011	1:38:57 PM	H2 valve closed
2/11/2011	1:38:57 PM	BCl3 valve closed
2/11/2011	1:38:57 PM	PH3 valve closed
2/11/2011	1:38:57 PM	SiCl4 pre valve closed
2/11/2011	1:38:57 PM	SiCl4 post valve closed
2/11/2011	1:38:57 PM	Main Vac valve closed
2/11/2011	1:38:57 PM	Bypass valve closed
2/11/2011	1:38:57 PM	Bubbler valve closed
2/11/2011	1:38:57 PM	Helium MFC set to  0.000000
2/11/2011	1:38:57 PM	H2 MFC set to  0.000000
2/11/2011	1:38:57 PM	BCl3 MFC set to  0.000000
2/11/2011	1:38:57 PM	PHl3 MFC set to  0.000000
2/11/2011	1:38:57 PM	SiCl4 MFC set to  0.000000
2/11/2011	1:38:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	1:38:57 PM	Tube furnace set to 0
2/11/2011	1:38:58 PM	Run finished at 1:38 PM
2/11/2011	1:43:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	1:43:32 PM	Recipe started at 1:43 PM
2/11/2011	1:43:32 PM	Helium valve closed
2/11/2011	1:43:32 PM	H2 valve closed
2/11/2011	1:43:32 PM	BCl3 valve closed
2/11/2011	1:43:32 PM	PH3 valve closed
2/11/2011	1:43:32 PM	SiCl4 pre valve closed
2/11/2011	1:43:32 PM	SiCl4 post valve closed
2/11/2011	1:43:32 PM	Main Vac valve closed
2/11/2011	1:43:32 PM	Bubbler valve closed
2/11/2011	1:43:32 PM	Bypass valve opened
2/11/2011	1:43:32 PM	Helium MFC set to  0.000000
2/11/2011	1:43:32 PM	H2 MFC set to  0.000000
2/11/2011	1:43:32 PM	BCl3 MFC set to  0.000000
2/11/2011	1:43:32 PM	PHl3 MFC set to  0.000000
2/11/2011	1:43:32 PM	SiCl4 MFC set to  0.000000
2/11/2011	1:43:32 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	1:43:32 PM	Tube furnace set to 0
2/11/2011	1:44:04 PM	Helium valve closed
2/11/2011	1:44:04 PM	H2 valve closed
2/11/2011	1:44:04 PM	BCl3 valve closed
2/11/2011	1:44:04 PM	PH3 valve closed
2/11/2011	1:44:04 PM	SiCl4 pre valve closed
2/11/2011	1:44:04 PM	SiCl4 post valve closed
2/11/2011	1:44:04 PM	Bubbler valve closed
2/11/2011	1:44:04 PM	Main Vac valve opened
2/11/2011	1:44:04 PM	Bypass valve opened
2/11/2011	1:44:04 PM	Helium MFC set to  0.000000
2/11/2011	1:44:04 PM	H2 MFC set to  0.000000
2/11/2011	1:44:04 PM	BCl3 MFC set to  0.000000
2/11/2011	1:44:04 PM	PHl3 MFC set to  0.000000
2/11/2011	1:44:04 PM	SiCl4 MFC set to  0.000000
2/11/2011	1:44:04 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	1:44:05 PM	Tube furnace set to 0
2/11/2011	1:44:05 PM	Run finished at 1:44 PM
2/11/2011	1:44:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	3:28:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2011	3:28:06 PM	Recipe started at 3:28 PM
2/11/2011	3:28:06 PM	H2 valve closed
2/11/2011	3:28:06 PM	BCl3 valve closed
2/11/2011	3:28:06 PM	PH3 valve closed
2/11/2011	3:28:06 PM	SiCl4 pre valve closed
2/11/2011	3:28:06 PM	SiCl4 post valve closed
2/11/2011	3:28:06 PM	Main Vac valve closed
2/11/2011	3:28:06 PM	Bypass valve closed
2/11/2011	3:28:06 PM	Bubbler valve closed
2/11/2011	3:28:06 PM	Helium valve opened
2/11/2011	3:28:06 PM	Helium MFC set to  500.000000
2/11/2011	3:28:06 PM	H2 MFC set to  0.000000
2/11/2011	3:28:06 PM	BCl3 MFC set to  0.000000
2/11/2011	3:28:06 PM	PHl3 MFC set to  0.000000
2/11/2011	3:28:06 PM	SiCl4 MFC set to  0.000000
2/11/2011	3:28:06 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	3:28:06 PM	Tube furnace set to 0
2/11/2011	3:29:25 PM	Helium valve closed
2/11/2011	3:29:25 PM	H2 valve closed
2/11/2011	3:29:25 PM	BCl3 valve closed
2/11/2011	3:29:25 PM	PH3 valve closed
2/11/2011	3:29:25 PM	SiCl4 pre valve closed
2/11/2011	3:29:25 PM	SiCl4 post valve closed
2/11/2011	3:29:25 PM	Main Vac valve closed
2/11/2011	3:29:25 PM	Bypass valve closed
2/11/2011	3:29:25 PM	Bubbler valve closed
2/11/2011	3:29:25 PM	Helium MFC set to  0.000000
2/11/2011	3:29:25 PM	H2 MFC set to  0.000000
2/11/2011	3:29:25 PM	BCl3 MFC set to  0.000000
2/11/2011	3:29:25 PM	PHl3 MFC set to  0.000000
2/11/2011	3:29:25 PM	SiCl4 MFC set to  0.000000
2/11/2011	3:29:25 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	3:29:25 PM	Tube furnace set to 0
2/11/2011	3:29:25 PM	Run finished at 3:29 PM
2/11/2011	3:29:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2011	3:31:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	3:31:59 PM	Recipe started at 3:31 PM
2/11/2011	3:31:59 PM	Helium valve closed
2/11/2011	3:31:59 PM	H2 valve closed
2/11/2011	3:31:59 PM	BCl3 valve closed
2/11/2011	3:31:59 PM	PH3 valve closed
2/11/2011	3:31:59 PM	SiCl4 pre valve closed
2/11/2011	3:31:59 PM	SiCl4 post valve closed
2/11/2011	3:31:59 PM	Main Vac valve closed
2/11/2011	3:31:59 PM	Bubbler valve closed
2/11/2011	3:31:59 PM	Bypass valve opened
2/11/2011	3:31:59 PM	Helium MFC set to  0.000000
2/11/2011	3:31:59 PM	H2 MFC set to  0.000000
2/11/2011	3:31:59 PM	BCl3 MFC set to  0.000000
2/11/2011	3:31:59 PM	PHl3 MFC set to  0.000000
2/11/2011	3:31:59 PM	SiCl4 MFC set to  0.000000
2/11/2011	3:31:59 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	3:31:59 PM	Tube furnace set to 0
2/11/2011	3:32:30 PM	Helium valve closed
2/11/2011	3:32:30 PM	H2 valve closed
2/11/2011	3:32:30 PM	BCl3 valve closed
2/11/2011	3:32:30 PM	PH3 valve closed
2/11/2011	3:32:30 PM	SiCl4 pre valve closed
2/11/2011	3:32:30 PM	SiCl4 post valve closed
2/11/2011	3:32:30 PM	Bubbler valve closed
2/11/2011	3:32:30 PM	Main Vac valve opened
2/11/2011	3:32:30 PM	Bypass valve opened
2/11/2011	3:32:30 PM	Helium MFC set to  0.000000
2/11/2011	3:32:30 PM	H2 MFC set to  0.000000
2/11/2011	3:32:30 PM	BCl3 MFC set to  0.000000
2/11/2011	3:32:30 PM	PHl3 MFC set to  0.000000
2/11/2011	3:32:30 PM	SiCl4 MFC set to  0.000000
2/11/2011	3:32:30 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	3:32:30 PM	Tube furnace set to 0
2/11/2011	3:32:30 PM	Run finished at 3:32 PM
2/11/2011	3:32:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	3:32:35 PM	Helium MFC set to  20.000000
2/11/2011	3:32:48 PM	Helium MFC set to  20.000000
2/11/2011	3:32:48 PM	Helium valve opened
2/11/2011	3:44:45 PM	Helium valve closed
2/11/2011	3:45:31 PM	Helium valve opened
2/11/2011	3:53:01 PM	Helium valve closed
2/11/2011	3:54:07 PM	Recipe started at 3:54 PM
2/11/2011	3:54:07 PM	Helium valve closed
2/11/2011	3:54:07 PM	BCl3 valve closed
2/11/2011	3:54:07 PM	PH3 valve closed
2/11/2011	3:54:07 PM	SiCl4 pre valve closed
2/11/2011	3:54:07 PM	SiCl4 post valve closed
2/11/2011	3:54:07 PM	Main Vac valve closed
2/11/2011	3:54:07 PM	Bypass valve closed
2/11/2011	3:54:07 PM	Bubbler valve closed
2/11/2011	3:54:07 PM	H2 valve opened
2/11/2011	3:54:07 PM	Helium MFC set to  0.000000
2/11/2011	3:54:07 PM	H2 MFC set to  500.000000
2/11/2011	3:54:07 PM	BCl3 MFC set to  0.000000
2/11/2011	3:54:07 PM	PHl3 MFC set to  0.000000
2/11/2011	3:54:07 PM	SiCl4 MFC set to  0.000000
2/11/2011	3:54:07 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	3:54:07 PM	Tube furnace set to 0
2/11/2011	3:55:31 PM	Helium valve closed
2/11/2011	3:55:31 PM	BCl3 valve closed
2/11/2011	3:55:31 PM	PH3 valve closed
2/11/2011	3:55:31 PM	SiCl4 pre valve closed
2/11/2011	3:55:31 PM	SiCl4 post valve closed
2/11/2011	3:55:31 PM	Main Vac valve closed
2/11/2011	3:55:31 PM	Bypass valve closed
2/11/2011	3:55:31 PM	H2 valve opened
2/11/2011	3:55:31 PM	Bubbler valve opened
2/11/2011	3:55:31 PM	Helium MFC set to  0.000000
2/11/2011	3:55:31 PM	H2 MFC set to  500.000000
2/11/2011	3:55:31 PM	BCl3 MFC set to  0.000000
2/11/2011	3:55:31 PM	PHl3 MFC set to  0.000000
2/11/2011	3:55:31 PM	SiCl4 MFC set to  0.000000
2/11/2011	3:55:31 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	3:55:32 PM	Tube furnace set to 1000
2/11/2011	4:15:32 PM	Helium valve closed
2/11/2011	4:15:32 PM	BCl3 valve closed
2/11/2011	4:15:32 PM	PH3 valve closed
2/11/2011	4:15:32 PM	Main Vac valve closed
2/11/2011	4:15:32 PM	Bypass valve closed
2/11/2011	4:15:32 PM	H2 valve opened
2/11/2011	4:15:32 PM	SiCl4 pre valve opened
2/11/2011	4:15:32 PM	SiCl4 post valve opened
2/11/2011	4:15:32 PM	Bubbler valve opened
2/11/2011	4:15:32 PM	Helium MFC set to  0.000000
2/11/2011	4:15:32 PM	H2 MFC set to  500.000000
2/11/2011	4:15:32 PM	BCl3 MFC set to  0.000000
2/11/2011	4:15:32 PM	PHl3 MFC set to  0.000000
2/11/2011	4:15:32 PM	SiCl4 MFC set to  50.000000
2/11/2011	4:15:32 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	4:15:32 PM	Tube furnace set to 1000
2/11/2011	4:35:32 PM	Helium valve closed
2/11/2011	4:35:32 PM	BCl3 valve closed
2/11/2011	4:35:32 PM	PH3 valve closed
2/11/2011	4:35:32 PM	SiCl4 pre valve closed
2/11/2011	4:35:32 PM	SiCl4 post valve closed
2/11/2011	4:35:32 PM	Main Vac valve closed
2/11/2011	4:35:32 PM	Bypass valve closed
2/11/2011	4:35:32 PM	H2 valve opened
2/11/2011	4:35:32 PM	Bubbler valve opened
2/11/2011	4:35:32 PM	Helium MFC set to  0.000000
2/11/2011	4:35:32 PM	H2 MFC set to  500.000000
2/11/2011	4:35:32 PM	BCl3 MFC set to  0.000000
2/11/2011	4:35:32 PM	PHl3 MFC set to  0.000000
2/11/2011	4:35:32 PM	SiCl4 MFC set to  0.000000
2/11/2011	4:35:32 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	4:35:32 PM	Tube furnace set to 1000
2/11/2011	4:40:32 PM	H2 valve closed
2/11/2011	4:40:32 PM	BCl3 valve closed
2/11/2011	4:40:32 PM	PH3 valve closed
2/11/2011	4:40:32 PM	SiCl4 pre valve closed
2/11/2011	4:40:32 PM	SiCl4 post valve closed
2/11/2011	4:40:32 PM	Main Vac valve closed
2/11/2011	4:40:32 PM	Bypass valve closed
2/11/2011	4:40:32 PM	Helium valve opened
2/11/2011	4:40:32 PM	Bubbler valve opened
2/11/2011	4:40:32 PM	Helium MFC set to  500.000000
2/11/2011	4:40:32 PM	H2 MFC set to  0.000000
2/11/2011	4:40:32 PM	BCl3 MFC set to  0.000000
2/11/2011	4:40:32 PM	PHl3 MFC set to  0.000000
2/11/2011	4:40:32 PM	SiCl4 MFC set to  0.000000
2/11/2011	4:40:32 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	4:40:32 PM	Tube furnace set to 0
2/11/2011	5:10:12 PM	Helium valve closed
2/11/2011	5:10:12 PM	H2 valve closed
2/11/2011	5:10:12 PM	BCl3 valve closed
2/11/2011	5:10:12 PM	PH3 valve closed
2/11/2011	5:10:12 PM	SiCl4 pre valve closed
2/11/2011	5:10:12 PM	SiCl4 post valve closed
2/11/2011	5:10:12 PM	Main Vac valve closed
2/11/2011	5:10:12 PM	Bypass valve closed
2/11/2011	5:10:12 PM	Bubbler valve closed
2/11/2011	5:10:12 PM	Helium MFC set to  0.000000
2/11/2011	5:10:12 PM	H2 MFC set to  0.000000
2/11/2011	5:10:12 PM	BCl3 MFC set to  0.000000
2/11/2011	5:10:12 PM	PHl3 MFC set to  0.000000
2/11/2011	5:10:12 PM	SiCl4 MFC set to  0.000000
2/11/2011	5:10:12 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	5:10:12 PM	Tube furnace set to 0
2/11/2011	5:10:13 PM	Run finished at 5:10 PM
2/11/2011	5:11:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	5:11:57 PM	Recipe started at 5:11 PM
2/11/2011	5:11:57 PM	Helium valve closed
2/11/2011	5:11:57 PM	H2 valve closed
2/11/2011	5:11:57 PM	BCl3 valve closed
2/11/2011	5:11:57 PM	PH3 valve closed
2/11/2011	5:11:57 PM	SiCl4 pre valve closed
2/11/2011	5:11:57 PM	SiCl4 post valve closed
2/11/2011	5:11:57 PM	Main Vac valve closed
2/11/2011	5:11:57 PM	Bubbler valve closed
2/11/2011	5:11:57 PM	Bypass valve opened
2/11/2011	5:11:57 PM	Helium MFC set to  0.000000
2/11/2011	5:11:57 PM	H2 MFC set to  0.000000
2/11/2011	5:11:57 PM	BCl3 MFC set to  0.000000
2/11/2011	5:11:57 PM	PHl3 MFC set to  0.000000
2/11/2011	5:11:57 PM	SiCl4 MFC set to  0.000000
2/11/2011	5:11:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	5:11:57 PM	Tube furnace set to 0
2/11/2011	5:12:27 PM	Helium valve closed
2/11/2011	5:12:27 PM	H2 valve closed
2/11/2011	5:12:27 PM	BCl3 valve closed
2/11/2011	5:12:27 PM	PH3 valve closed
2/11/2011	5:12:27 PM	SiCl4 pre valve closed
2/11/2011	5:12:27 PM	SiCl4 post valve closed
2/11/2011	5:12:27 PM	Bubbler valve closed
2/11/2011	5:12:27 PM	Main Vac valve opened
2/11/2011	5:12:27 PM	Bypass valve opened
2/11/2011	5:12:27 PM	Helium MFC set to  0.000000
2/11/2011	5:12:27 PM	H2 MFC set to  0.000000
2/11/2011	5:12:27 PM	BCl3 MFC set to  0.000000
2/11/2011	5:12:27 PM	PHl3 MFC set to  0.000000
2/11/2011	5:12:27 PM	SiCl4 MFC set to  0.000000
2/11/2011	5:12:27 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	5:12:28 PM	Tube furnace set to 0
2/11/2011	5:12:28 PM	Run finished at 5:12 PM
2/11/2011	5:12:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	5:51:56 PM	Bypass valve closed
2/11/2011	5:51:57 PM	Main Vac valve closed
2/11/2011	5:56:42 PM	Program started after a nonstandard shutdown
2/11/2011	5:56:43 PM	Helium valve closed
2/11/2011	5:56:43 PM	H2 valve closed
2/11/2011	5:56:43 PM	BCl3 valve closed
2/11/2011	5:56:43 PM	PH3 valve closed
2/11/2011	5:56:43 PM	SiCl4 pre valve closed
2/11/2011	5:56:43 PM	SiCl4 post valve closed
2/11/2011	5:56:43 PM	Main Vac valve closed
2/11/2011	5:56:43 PM	Bypass valve closed
2/11/2011	5:56:43 PM	Bubbler valve closed
2/11/2011	5:56:43 PM	Helium MFC set to  0.000000
2/11/2011	5:56:43 PM	H2 MFC set to  0.000000
2/11/2011	5:56:43 PM	BCl3 MFC set to  0.000000
2/11/2011	5:56:43 PM	PHl3 MFC set to  0.000000
2/11/2011	5:56:43 PM	SiCl4 MFC set to  0.000000
2/11/2011	5:56:43 PM	Bypass solenoid MFC set to  760.000000
2/11/2011	5:56:43 PM	Tube furnace set to 0
2/11/2011	5:56:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	5:56:49 PM	Recipe started at 5:56 PM
2/11/2011	5:56:49 PM	Helium valve closed
2/11/2011	5:56:49 PM	H2 valve closed
2/11/2011	5:56:49 PM	BCl3 valve closed
2/11/2011	5:56:49 PM	PH3 valve closed
2/11/2011	5:56:49 PM	SiCl4 pre valve closed
2/11/2011	5:56:49 PM	SiCl4 post valve closed
2/11/2011	5:56:49 PM	Main Vac valve closed
2/11/2011	5:56:49 PM	Bubbler valve closed
2/11/2011	5:56:49 PM	Bypass valve opened
2/11/2011	5:56:49 PM	Helium MFC set to  0.000000
2/11/2011	5:56:49 PM	H2 MFC set to  0.000000
2/11/2011	5:56:49 PM	BCl3 MFC set to  0.000000
2/11/2011	5:56:49 PM	PHl3 MFC set to  0.000000
2/11/2011	5:56:49 PM	SiCl4 MFC set to  0.000000
2/11/2011	5:56:49 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	5:56:49 PM	Tube furnace set to 0
2/11/2011	5:56:49 PM	Helium valve closed
2/11/2011	5:56:49 PM	H2 valve closed
2/11/2011	5:56:49 PM	BCl3 valve closed
2/11/2011	5:56:49 PM	PH3 valve closed
2/11/2011	5:56:49 PM	SiCl4 pre valve closed
2/11/2011	5:56:49 PM	SiCl4 post valve closed
2/11/2011	5:56:49 PM	Bubbler valve closed
2/11/2011	5:56:49 PM	Main Vac valve opened
2/11/2011	5:56:49 PM	Bypass valve opened
2/11/2011	5:56:49 PM	Helium MFC set to  0.000000
2/11/2011	5:56:49 PM	H2 MFC set to  0.000000
2/11/2011	5:56:49 PM	BCl3 MFC set to  0.000000
2/11/2011	5:56:49 PM	PHl3 MFC set to  0.000000
2/11/2011	5:56:49 PM	SiCl4 MFC set to  0.000000
2/11/2011	5:56:49 PM	Bypass solenoid MFC set to  0.000000
2/11/2011	5:56:49 PM	Tube furnace set to 0
2/11/2011	5:56:50 PM	Run finished at 5:56 PM
2/11/2011	5:56:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2011	6:03:43 PM	Bypass valve closed
2/11/2011	6:03:44 PM	Main Vac valve closed
2/11/2011	6:03:44 PM	Main Vac valve opened
2/11/2011	6:03:45 PM	Bypass valve opened
2/11/2011	6:03:46 PM	Main Vac valve closed
2/11/2011	6:03:46 PM	Main Vac valve opened
